Nickel Chromium (NiCr) Sputtering Target are used for depositing nickel chromium alloy resistive film by PVD technology, the nickel chromium film has high resistivity, low temperature coefficient of resistance, high sensitivity coefficient and low temperature dependence. The resistive film of nickel chromium alloy is easily prepared,and PVD coating process is mature, and coating layer performance is excellent, therefore it is mainly used to deposit precision resistive films in hybrid integrated circuits, which can meet the performance requirements of resistive strain gauge sensitive films, and commonly used for preparing thin film resistance strain gauges.
In the PVD coating industry, NiCr binary alloy target and its films are widely used in surface strengthened thin films such as abrasion resistance, abrasion reduction, heat and corrosion resistance, as well as low-emissivity glass, microelectronics, magnetic recording, semiconductors and film resistors and other high-end technology industries.
The following pictures are two micrographs of our NiCr(80/20 wt%) alloy sputtering target, the average grain size<100μm.