Xinkang produce Indium Gallium Zinc Oxide (IGZO) Sputtering Targets with different shapes like disk, rectangle, column, step and custom shape. The typical diameter for circular targets include 1 inch, 2 inch, 3 inch, 4 inch or 50mm, 60mm, 80mm, 100mm etc. Typical thickness include 0.125 inch and 0.25 inch or 3mm, 4mm, 5mm, 6mm etc.
Xinkang Sputtering targets can be bonded with copper backing plate as reuqest. Different purity, shape and size can also be custom-made for Indium Gallium Zinc Oxide (IGZO) Sputtering Targets. You can send us your inquiry for a quote.
From the selection of raw materials to the control of temperature, pressure and time of hot press sintering, we strictly follow the specific production process, thus the finished ceramic sputtering targets have the characteristics of high purity, high density, uniform surface color without spots and crack, the end user can obtain constant erosion rates and high pure and homogeneous thin films during PVD process.
Indium Gallium Zinc Oxide Sputtering Target
Purity: 99.99%;
Production Method: hot press sintering
Available dimensions:
Circular: Diameter = 1", 2", 3" and 4", other size can be customized
Rectangular: Length = 3mm and 6mm
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